ABSTRACT: In this paper, we showed a resonator-based MEMS engineering for multi-sensor SOC applications. A recently created 0.18 μm 1P6M CMOS ASIC/MEMS process was received to incorporate MEMS sensor and circuits solidly. By utilizing resonators as the building hinders, various MEMS sensors including ecological temperature sensor, surrounding weight sensor, accelerometer and in addition gyro sensor […]
