Monolithic Multi-Sensor Design With Resonator-Based MEMS Structures


In this paper, we showed a resonator-based MEMS engineering for multi-sensor SOC applications. A recently created 0.18 μm 1P6M CMOS ASIC/MEMS process was received to incorporate MEMS sensor and circuits solidly. By utilizing resonators as the building hinders, various MEMS sensors including ecological temperature sensor, surrounding weight sensor, accelerometer and in addition gyro sensor can be solidly executed with the readout circuits by the single standard ASIC/MEMS process without off-fab pre/post forms. The proposed engineering empowers minimal and inventive aware helped SOC plan for the developing IOT applications.

BASE PAPER: Monolithic Multi-Sensor Design With Resonator-Based MEMS Structures

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