Optical self-excitation and detection for inertial MEMS Sensors


We give an account of the improvement of an optical self-excitation and location strategy to take into consideration high steadiness activity of inertial MEMS sensors. A solitary consistent sufficiency laser shaft is utilized to both drive and optically cross examine the resounding recurrence of a MEMS resonator. A parametric investigation of x,y,z position of the laser spot area, laser power, and laser wavelength concerning recurrence strength of the MEMS sensor is displayed. A recurrence predisposition insecurity of 3 ppb at 1 s with no alignment and a recurrence background noise 2.4 ppb/√Hz for a MEMS resonator with thunderous recurrence of 68.28 kHz and quality factor of 4,600 have been estimated.

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